Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry | JILA

Author	Michael Tanksalvala Christina Porter Yuka Esashi Bin Wang Nicholas Jenkins Zhe Zhang Galen Miley Joshua Knobloch Brendan McBennett Naoto Horiguchi Sadegh Yazdi Jihan Zhou Matthew Jacobs Charles Bevis Robert Karl Peter Johnsen David Ren Laura Waller Daniel Adams Seth Cousin Chen-Ting Liao Jianwei Miao Michael Gerrity Henry Kapteyn Margaret Murnane
Abstract
Year of Publication	2021
Date Published	2021-01
Journal Title	Science Advances
Volume	7
Issue	5
Start Page or Article ID	eabd9667
DOI	10.1126/sciadv.abd9667
URL	https://advances.sciencemag.org/content/7/5/eabd9667
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JILA PI	Henry Kapteyn Margaret Murnane
	Journal Article
JILA Topics	Atomic & Molecular Physics Nanoscience
Publication Status	Published