Author	Yang Zhao Minyao Mao R. Horowitz A. Majumdar J. Varesi P. Norton J. Kitching
Year of Publication	2002
Date Published	Jan-04-2002
Journal Title	Journal of Microelectromechanical Systems
Volume	11
Start Page or Article ID	136-146
ISSN Number	10577157
DOI	10.1109/84.993448
URL	http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=993448
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	Journal Article
Publication Status	Published