TY - JOUR
AU - Yang Zhao
AU - Minyao Mao
AU - R. Horowitz
AU - A. Majumdar
AU - J. Varesi
AU - P. Norton
AU - J. Kitching
BT - Journal of Microelectromechanical Systems
DA - Jan-04-2002
DO - 10.1109/84.993448
PY - 2002
SP - 136
EP - 146
T2 - Journal of Microelectromechanical Systems
TI - Optomechanical uncooled infrared imaging system: design, microfabrication, and performance
UR - http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=993448
VL - 11
SN - 10577157
ER -