@article{793,
  author = {Yang Zhao and Minyao Mao and R. Horowitz and A. Majumdar and J. Varesi and P. Norton and J. Kitching},
  title = {Optomechanical uncooled infrared imaging system: design, microfabrication, and performance},
  year = {2002},
  journal = {Journal of Microelectromechanical Systems},
  volume = {11},
  pages = {136-146},
  month = {Jan-04-2002},
  issn = {10577157},
  url = {http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=993448},
  doi = {10.1109/84.993448},
}