Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking
| Author | |
|---|---|
| Year of Publication |
1998
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| Date Published |
Jan-01-1998
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| Journal Title |
Journal of Applied Physics
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| Volume |
83
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| Start Page or Article ID |
1917
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| ISSN Number |
00218979
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |