@article{6547,
  author = {N. Materer and R. Goodman and Stephen Leone},
  title = {Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking},
  year = {1998},
  journal = {Journal of Applied Physics},
  volume = {83},
  pages = {1917},
  month = {Jan-01-1998},
  issn = {00218979},
  doi = {10.1063/1.366916},
}