TY - JOUR
AU - N. Materer
AU - R. Goodman
AU - Stephen Leone
BT - Journal of Applied Physics
DA - Jan-01-1998
DO - 10.1063/1.366916
PY - 1998
EP - 1917
T2 - Journal of Applied Physics
TI - Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking
VL - 83
SN - 00218979
ER -