Surface roughening during plasma-enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates
| Author | |
| Year of Publication |
1997
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| Date Published |
Jan-08-1997
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| Journal Title |
Physical Review B
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| Volume |
56
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| Start Page or Article ID (correct) |
4243-4250
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| ISSN Number |
0163-1829
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |