Surface roughening during plasma-enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates
| Author | |
|---|---|
| Year of Publication |
1997
|
| Date Published |
Jan-08-1997
|
| Journal Title |
Physical Review B
|
| Volume |
56
|
| Start Page or Article ID |
4243-4250
|
| ISSN Number |
0163-1829
|
| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
|
|
| Publication Status |