@article{6232,
  author = {D. Tanenbaum and A. Laracuente and Alan Gallagher},
  title = {Surface roughening during plasma-enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates},
  year = {1997},
  journal = {Physical Review B},
  volume = {56},
  pages = {4243-4250},
  month = {Jan-08-1997},
  issn = {0163-1829},
  doi = {10.1103/PhysRevB.56.4243},
}