TY - JOUR
AU - D. Tanenbaum
AU - A. Laracuente
AU - Alan Gallagher
BT - Physical Review B
DA - Jan-08-1997
DO - 10.1103/PhysRevB.56.4243
PY - 1997
SP - 4243
EP - 4250
T2 - Physical Review B
TI - Surface roughening during plasma-enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates
VL - 56
SN - 0163-1829
ER -