Generation of a velocity selected, pulsed source of hyperthermal (1\textendash10 eV) neutral metal atoms for thin film growth studies
| Author | |
|---|---|
| Year of Publication |
1997
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| Date Published |
Jan-09-1997
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| Journal Title |
Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
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| Volume |
15
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| Start Page or Article ID |
2709
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| ISSN Number |
07342101
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |