@article{6101,
  author = {M. Knowles and Stephen Leone},
  title = {Generation of a velocity selected, pulsed source of hyperthermal (1\textendash10 eV) neutral metal atoms for thin film growth studies},
  year = {1997},
  journal = {Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films},
  volume = {15},
  pages = {2709},
  month = {Jan-09-1997},
  issn = {07342101},
  doi = {10.1116/1.580945},
}