TY - JOUR
AU - M. Knowles
AU - Stephen Leone
BT - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
DA - Jan-09-1997
DO - 10.1116/1.580945
PY - 1997
EP - 2709
T2 - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
TI - Generation of a velocity selected, pulsed source of hyperthermal (1\textendash10 eV) neutral metal atoms for thin film growth studies
VL - 15
SN - 07342101
ER -