Ar, N2, and Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking
| Author | |
| Year of Publication |
1997
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| Date Published |
Jan-07-1997
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| Journal Title |
Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
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| Volume |
15
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| Start Page or Article ID (correct) |
971
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| ISSN Number |
0734211X
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |