@article{6036,
  author = {R. Goodman and N. Materer and Stephen Leone},
  title = {Ar, N2, and Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking},
  year = {1997},
  journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures},
  volume = {15},
  pages = {971},
  month = {Jan-07-1997},
  issn = {0734211X},
  doi = {10.1116/1.589517},
}