TY - JOUR
AU - R. Goodman
AU - N. Materer
AU - Stephen Leone
BT - Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
DA - Jan-07-1997
DO - 10.1116/1.589517
PY - 1997
EP - 971
T2 - Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
TI - Ar, N2, and Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking
VL - 15
SN - 0734211X
ER -