Nanoparticle deposition in hydrogenated amorphous silicon films during rf plasma deposition
| Author | |
| Year of Publication |
1996
|
| Date Published |
Jan-01-1996
|
| Journal Title |
Applied Physics Letters
|
| Volume |
68
|
| Start Page or Article ID (correct) |
1705
|
| ISSN Number |
00036951
|
| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
|
|
| Publication Status |