@article{5911,
  author = {D. Tanenbaum and A. Laracuente and Alan Gallagher},
  title = {Nanoparticle deposition in hydrogenated amorphous silicon films during rf plasma deposition},
  year = {1996},
  journal = {Applied Physics Letters},
  volume = {68},
  pages = {1705},
  month = {Jan-01-1996},
  issn = {00036951},
  doi = {10.1063/1.115912},
}