Film quality in relation to deposition conditions of a-SI:H films deposited by the \textquoteleft\textquotelefthot wire\textquoteright\textquoteright method using highly diluted silane
| Author | |
| Year of Publication |
1996
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| Date Published |
Jan-01-1996
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| Journal Title |
Journal of Applied Physics
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| Volume |
79
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| Start Page or Article ID (correct) |
7278
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| ISSN Number |
00218979
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |