@article{5840,
  author = {E. Molenbroek and A. Mahan and E. Johnson and Alan Gallagher},
  title = {Film quality in relation to deposition conditions of a-SI:H films deposited by the \textquoteleft\textquotelefthot wire\textquoteright\textquoteright method using highly diluted silane},
  year = {1996},
  journal = {Journal of Applied Physics},
  volume = {79},
  pages = {7278},
  month = {Jan-01-1996},
  issn = {00218979},
  doi = {10.1063/1.361445},
}