TY - JOUR
AU - E. Molenbroek
AU - A. Mahan
AU - E. Johnson
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1996
DO - 10.1063/1.361445
PY - 1996
EP - 7278
T2 - Journal of Applied Physics
TI - Film quality in relation to deposition conditions of a-SI:H films deposited by the \textquoteleft\textquotelefthot wire\textquoteright\textquoteright method using highly diluted silane
VL - 79
SN - 00218979
ER -