Chemistry of arsenic incorporation during GaAs/GaAs(100) molecular beam epitaxy probed by simultaneous laser flux monitoring and reflection high-energy electron diffraction

Author
Year of Publication
1996
Date Published
Jan-07-1996
Journal Title
Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
Volume
14
Start Page or Article ID (correct)
2742
ISSN Number
0734211X
DOI
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