TY - JOUR AU - A. Ott AU - S. Casey AU - A. Alstrin AU - Stephen Leone BT - Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures DA - Jan-07-1996 DO - 10.1116/1.589013 PY - 1996 EP - 2742 T2 - Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures TI - Chemistry of arsenic incorporation during GaAs/GaAs(100) molecular beam epitaxy probed by simultaneous laser flux monitoring and reflection high-energy electron diffraction VL - 14 SN - 0734211X ER -