@article{5806, author = {A. Ott and S. Casey and A. Alstrin and Stephen Leone}, title = {Chemistry of arsenic incorporation during GaAs/GaAs(100) molecular beam epitaxy probed by simultaneous laser flux monitoring and reflection high-energy electron diffraction}, year = {1996}, journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures}, volume = {14}, pages = {2742}, month = {Jan-07-1996}, issn = {0734211X}, doi = {10.1116/1.589013}, }