Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
| Author | |
| Year of Publication |
1995
|
| Date Published |
Jan-02-1995
|
| Journal Title |
Physical Review E
|
| Volume |
51
|
| Start Page or Article ID (correct) |
1376-1390
|
| ISSN Number |
1063-651X
|
| DOI | |
| URL | |
| Download citation | |
Journal Article
|
|
| Publication Status |