TY - JOUR
AU - J. Boeuf
AU - L. Pitchford
BT - Physical Review E
DA - Jan-02-1995
DO - 10.1103/PhysRevE.51.1376
PY - 1995
SP - 1376
EP - 1390
T2 - Physical Review E
TI - Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
UR - http://link.aps.org/doi/10.1103/PhysRevE.51.1376
VL - 51
SN - 1063-651X
ER -