@article{5757, author = {J. Boeuf and L. Pitchford}, title = {Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor}, year = {1995}, journal = {Physical Review E}, volume = {51}, pages = {1376-1390}, month = {Jan-02-1995}, issn = {1063-651X}, url = {http://link.aps.org/doi/10.1103/PhysRevE.51.1376}, doi = {10.1103/PhysRevE.51.1376}, }