Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
| Author | |
|---|---|
| Year of Publication |
2001
|
| Date Published |
Jan-01-2001
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| Journal Title |
Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
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| Volume |
19
|
| Start Page or Article ID |
142
|
| ISSN Number |
0734211X
|
| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |