Author	B. Dragnea J. Preusser J. Szarko Stephen Leone W. Hinsberg
Year of Publication	2001
Date Published	Jan-01-2001
Journal Title	Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
Volume	19
Start Page or Article ID (correct)	142
ISSN Number	0734211X
DOI	10.1116/1.1340662
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JILA PI	Stephen Leone
	Journal Article
Publication Status	Published