@article{523,
  author = {B. Dragnea and J. Preusser and J. Szarko and Stephen Leone and W. Hinsberg},
  title = {Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy},
  year = {2001},
  journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures},
  volume = {19},
  pages = {142},
  month = {Jan-01-2001},
  issn = {0734211X},
  doi = {10.1116/1.1340662},
}