TY - JOUR
AU - B. Dragnea
AU - J. Preusser
AU - J. Szarko
AU - Stephen Leone
AU - W. Hinsberg
BT - Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
DA - Jan-01-2001
DO - 10.1116/1.1340662
PY - 2001
EP - 142
T2 - Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
TI - Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
VL - 19
SN - 0734211X
ER -