Author	G. Stutzin K. Rozsa Alan Gallagher
Year of Publication	1993
Date Published	Jan-05-1993
Journal Title	Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
Volume	11
Start Page or Article ID (correct)	647
ISSN Number	07342101
DOI	10.1116/1.578786
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JILA PI	Alan Gallagher
	Journal Article
Publication Status	Published