@article{5106,
  author = {G. Stutzin and K. Rozsa and Alan Gallagher},
  title = {Deposition rates in direct current diode sputtering},
  year = {1993},
  journal = {Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films},
  volume = {11},
  pages = {647},
  month = {Jan-05-1993},
  issn = {07342101},
  doi = {10.1116/1.578786},
}