TY - JOUR
AU - G. Stutzin
AU - K. Rozsa
AU - Alan Gallagher
BT - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
DA - Jan-05-1993
DO - 10.1116/1.578786
PY - 1993
EP - 647
T2 - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
TI - Deposition rates in direct current diode sputtering
VL - 11
SN - 07342101
ER -