A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. II: Cl4, SiH4, and CH4 | JILA

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Author	W. Morgan
Year of Publication	1992
Date Published	Jan-12-1992
Journal Title	Plasma Chemistry and Plasma Processing
Volume	12
Start Page or Article ID	477-493
ISSN Number	0272-4324
DOI	10.1007/BF01447255
URL	http://link.springer.com/10.1007/BF01447255
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	Journal Article
Publication Status	Published