@article{4885,
  author = {W. Morgan},
  title = {A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. II: Cl4, SiH4, and CH4},
  year = {1992},
  journal = {Plasma Chemistry and Plasma Processing},
  volume = {12},
  pages = {477-493},
  month = {Jan-12-1992},
  issn = {0272-4324},
  url = {http://link.springer.com/10.1007/BF01447255},
  doi = {10.1007/BF01447255},
}