TY - JOUR
AU - W. Morgan
BT - Plasma Chemistry and Plasma Processing
DA - Jan-12-1992
DO - 10.1007/BF01447255
PY - 1992
SP - 477
EP - 493
T2 - Plasma Chemistry and Plasma Processing
TI - A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. II: Cl4, SiH4, and CH4
UR - http://link.springer.com/10.1007/BF01447255
VL - 12
SN - 0272-4324
ER -