Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
| Author | |
|---|---|
| Year of Publication |
2001
|
| Date Published |
Jan-05-2001
|
| Journal Title |
Applied Surface Science
|
| Volume |
175-176
|
| Start Page or Article ID |
783-789
|
| ISSN Number |
01694332
|
| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
|
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| Publication Status |