@article{394,
  author = {B. Dragnea and J. Preusser and J. Szarko and L. McDonough and Stephen Leone and W. Hinsberg},
  title = {Chemical mapping of patterned polymer photoresists by near-field infrared microscopy},
  year = {2001},
  journal = {Applied Surface Science},
  volume = {175-176},
  pages = {783-789},
  month = {Jan-05-2001},
  issn = {01694332},
  doi = {10.1016/S0169-4332(01)00068-X},
}