TY - JOUR
AU - B. Dragnea
AU - J. Preusser
AU - J. Szarko
AU - L. McDonough
AU - Stephen Leone
AU - W. Hinsberg
BT - Applied Surface Science
DA - Jan-05-2001
DO - 10.1016/S0169-4332(01)00068-X
PY - 2001
SP - 783
EP - 789
T2 - Applied Surface Science
TI - Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
VL - 175-176
SN - 01694332
ER -