Radical species involved in hotwire (catalytic) deposition of hydrogenated amorphous silicon
| Author | |
| Year of Publication |
2008
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| Date Published |
Jan-01-2008
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| Journal Title |
Thin Solid Films
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| Volume |
516
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| Start Page or Article ID (correct) |
929-939
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| ISSN Number |
00406090
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |