TY - JOUR
AU - W. Zheng
AU - Alan Gallagher
BT - Thin Solid Films
DA - Jan-01-2008
DO - 10.1016/j.tsf.2007.05.002
PY - 2008
SP - 929
EP - 939
T2 - Thin Solid Films
TI - Radical species involved in hotwire (catalytic) deposition of hydrogenated amorphous silicon
VL - 516
SN - 00406090
ER -