@article{2207,
  author = {W. Zheng and Alan Gallagher},
  title = {Radical species involved in hotwire (catalytic) deposition of hydrogenated amorphous silicon},
  year = {2008},
  journal = {Thin Solid Films},
  volume = {516},
  pages = {929-939},
  month = {Jan-01-2008},
  issn = {00406090},
  doi = {10.1016/j.tsf.2007.05.002},
}