Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 A/s
| Author | |
|---|---|
| Year of Publication |
2001
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| Date Published |
Jan-01-2001
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| Journal Title |
Applied Physics Letters
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| Volume |
78
|
| Start Page or Article ID |
3788
|
| ISSN Number |
00036951
|
| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
|
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| Publication Status |