TY - JOUR
AU - A. Mahan
AU - Y. Xu
AU - B. Nelson
AU - R. Crandall
AU - J. Cohen
AU - K. Palinginis
AU - Alan Gallagher
BT - Applied Physics Letters
DA - Jan-01-2001
DO - 10.1063/1.1375008
PY - 2001
EP - 3788
T2 - Applied Physics Letters
TI - Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 A/s
VL - 78
SN - 00036951
ER -