Skip to main content
JILA PFC
STROBE
CUbit
Jhub (JILA Members)
CU
NIST
Map
Log in
Search
Search
Enter the terms you wish to search for.
a joint institute of
and
About
Home
About JILA
History
Maps & Travel Info
Social Media
For the Media
Research
Research Topics
Science Publications
Graduate Student Theses
JILA Light & Matter Publication
Science Support/Technical Facilities
JILA Centers
People
Research Groups
Other JILA Faculty
Leadership and Administrative/Technical Staff
Outreach
JILA Impact
Education & Outreach
Community
News & Events
Research Highlights
JILA News
The JILA Journal blog
Science Events Calendar
Events List (Filter by Type)
Science Events Calendar (mobile)
Work/Collaborate
Prospective Students
Postdoctoral Researchers
Visiting Fellows
Diversity
Job Opportunities
Make a Gift
Plasma chemistry in silane/germane and disilane/germane mixtures
Author
John Doyle
D. Doughty
Alan Gallagher
Year of Publication
1992
Date Published
Jan-01-1992
Journal Title
Journal of Applied Physics
Volume
71
Start Page or Article ID
4727
ISSN Number
00218979
DOI
10.1063/1.350663
Download citation
DOI
Google Scholar
BibTeX
RIS
JILA PI
Alan Gallagher
Journal Article
Publication Status
Published