TY - JOUR
AU - John Doyle
AU - D. Doughty
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1992
DO - 10.1063/1.350663
PY - 1992
EP - 4727
T2 - Journal of Applied Physics
TI - Plasma chemistry in silane/germane and disilane/germane mixtures
VL - 71
SN - 00218979
ER -