A critical evaluation of low energy electron impact cross sections for plasma processing modeling: (I) Cl2, F2, and HCl; (II) CF4, SiH4, and CH4 | JILA - Exploring the Frontiers of Physics

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a joint institute of

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NIST - National Instiute for Standards & Technology

Author	W. Morgan
Year of Publication	1991
Date Published	06/1991
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	Journal Article
Publication Status	Published