@article{4629,
  author = {W. Morgan},
  title = {A critical evaluation of low energy electron impact cross sections for plasma processing modeling: (I) Cl2, F2, and HCl; (II) CF4, SiH4, and CH4},
  year = {1991},
  number = {34},
  month = {06/1991},
  address = {Boulder, Colorado},
  note = {JILA Pub. 4565},
}