TY - JOUR
AU - W. Morgan
CY - Boulder, Colorado
DA - 06/1991
M1 - 34
N1 - JILA Pub. 4565
PP - Boulder, Colorado
PY - 1991
TI - A critical evaluation of low energy electron impact cross sections for plasma processing modeling: (I) Cl2, F2, and HCl; (II) CF4, SiH4, and CH4
ER -