Reliable characterization of materials and nanostructured systems <<50nm using coherent EUV beams

Author
Year of Publication
2016
Conference Name
unknown
Date Published
2016-01
Publisher
SPIE
Conference Location
San Jose, California, United States
URL
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2219434
DOI
10.1117/12.2219434