Reliable characterization of materials and nanostructured systems <<50nm using coherent EUV beams
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Year of Publication |
2016
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Conference Name |
unknown
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Date Published |
2016-01
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Publisher |
SPIE
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Conference Location |
San Jose, California, United States
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URL |
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2219434
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DOI |
10.1117/12.2219434
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